JPH0744013Y2 - ウェーハ薬液処理装置 - Google Patents
ウェーハ薬液処理装置Info
- Publication number
- JPH0744013Y2 JPH0744013Y2 JP9068389U JP9068389U JPH0744013Y2 JP H0744013 Y2 JPH0744013 Y2 JP H0744013Y2 JP 9068389 U JP9068389 U JP 9068389U JP 9068389 U JP9068389 U JP 9068389U JP H0744013 Y2 JPH0744013 Y2 JP H0744013Y2
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- carrier table
- chemical treatment
- wafer
- liquid tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000126 substance Substances 0.000 title claims description 9
- 239000007788 liquid Substances 0.000 claims description 35
- 235000012431 wafers Nutrition 0.000 claims description 25
- 239000004065 semiconductor Substances 0.000 claims description 15
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 238000000034 method Methods 0.000 claims description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 14
- 238000004140 cleaning Methods 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000010802 sludge Substances 0.000 description 3
- 239000000969 carrier Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000012993 chemical processing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9068389U JPH0744013Y2 (ja) | 1989-07-31 | 1989-07-31 | ウェーハ薬液処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9068389U JPH0744013Y2 (ja) | 1989-07-31 | 1989-07-31 | ウェーハ薬液処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0330427U JPH0330427U (en]) | 1991-03-26 |
| JPH0744013Y2 true JPH0744013Y2 (ja) | 1995-10-09 |
Family
ID=31640199
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9068389U Expired - Lifetime JPH0744013Y2 (ja) | 1989-07-31 | 1989-07-31 | ウェーハ薬液処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0744013Y2 (en]) |
-
1989
- 1989-07-31 JP JP9068389U patent/JPH0744013Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0330427U (en]) | 1991-03-26 |
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